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Ultra high purity pressure gauge
Description:

All wetted parts are electro-polished accord to SEMI F19, Ra≤0.25um

100% Helium leak tested and packed in class 100 clean room

Class A accuracy per ASME B40.1

VCR compatible pressure connection threads, include male and feamle


Application:

OEM customer

Semiconductor

Solar PV

Specialty Gas


Accuracy(ASME B40.1)

        Class B:1.5" dial size

        Class A:2"dial size

 Pressure range:0...15psi- 0...6000psi (include vaccum)

Pressure limitation:

        Steady: 3/4 time of FS

        Fluctuating: 2/3 time of FS

        Short time: FS

Dial size:1.5" or 2"

Thermal drift:Max 0.4%FS/10°C (reference at 20°C)

Temperature

         Ambient temperature:-40... +60°C

        Medial temperature:-40 ... +100°C

        Storage temperature:-20... +50°C

Ingress protection:IP54 (EN 60529)

Ambient humidity:<85 % RH, non-condensating

Socket:316LSS

Bourdon tube:316LSS EP class

Case:304SS, electro-polished

Process connection:9/16"-18UNF(1/4"VCR) swivelmale or female

Wetted Roughness:

        Ra≤0.25um (socket)

        Ra0.3um (welding parts)

Mounting direction:Bottom or center back

Tool