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Ultra high purity transducer
Description:

all wetted parts are electro-polished accord to SEMI F19,RA≤0.13μm

100% helium leak tested and packed in class 100 clean room

accuracy up to 0.1%BFSL(include linearity ,hysteresis and repeatability)

various type of VCR connection available:male,female,fixed and swivel

Application:

OEM customer

semiconductor

solar PV

specialty Gas


accuracy:                 0.15%BFSL

pressure range:        0-80psi  0-5000psi

over pressure:          2 times of full scale

burst pressure:         5  times of full scale

long term stability:    max 0.25%FS/year

thermal drift:             max 0.25%FS/10℃

leakage test:               <1*10-9mbar L/S

response time:         <1.5mS

output signal:             4-20mA  2wire

power supply:            10-30VDC

electronical connection:M12*1(4 pins)

process connection:9/16"-18UNF(1/4"VCR) female,male,fixed,swivel

surface finish:             Ra≤0.13μm(typical) Ra≤0.18μm(max)

explosion proof:          Ex na IIC T4/T5/T6 Gc

short circuit protection:yes

reversed polarity protection:yes

sensor material:          17-4PH

wetted parts:                316LSS

housing material:         304SS


Tool